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Secondary ions are extracted from the sample as they are produced.
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They help tune the primary beam through the middle of the electrostatic lenses. Other deflectors (not shown) are located near the apertures. The best depth resolution in a depth profile results when the secondary ions are sampled from the flat bottom of such a crater without contributions from the crater edges. This leads to flat bottom sputter craters. A finely focused and rastered primary ion beam delivers uniform primary beam intensity to an area on the sample. A narrow beam (at the sample) results from defocusing the ion beam (with the middle lens) onto the back of the second aperture, and then adjusting the last lens to transfer the image of the cross-over from behind the aperture onto the sample.Įlectrostatic deflectors steer the primary beam in a raster pattern onto the sample. The primary beam intensity can be reduced by defocusing the ion beam onto the back of the first aperture (nearest the magnet). Several aperture diameters are usually available at each aperture location. The electrostatic lenses and the apertures control the intensity and width of the primary ion beam. The ion beam trajectories (indicated in red) are greatly exaggerated in the lateral directions. In the figure above, the electromagnetically active components are shown in blue. Without a primary beam mass filter, these metal contaminants deposit onto the sample surface, raising the detection limits for stainless steel elements. For example, Cr, Fe, and Ni ions sputter from stainless steel surfaces within a duoplasmatron. This mass filter eliminates impurity species in the beam. The column usually contains a primary beam mass filter that transmits only ions with a specified mass-to-charge (m/z) ratio.
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Primary ions are extracted from the sources and passed to the sample through the primary ion column. The geological community also uses SIMS for laterally resolved isotopic and elemental measurements. The electronic materials industries (semiconductors, optoelectric devices, etc.) are the largest users of SIMS. SIMS also provides lateral and depth distributions (microanalysis) of these elements within a sample. SIMS measures trace levels of all elements in the periodic table. The use of SIMS for materials characterization has grown steadily during the intervening 30 years. When it performed better than expected, exact copies of the prototype were introduced into the market place. The first SIMS instrument was constructed under a NASA contract in the early 1960’s to analyze moon rocks. Later experiments extracted ions from the sources and accelerated them onto the sample, thereby producing the first SIMS primary ion beam. The first inklings of the SIMS process came when early mass spectroscopists noticed that ions from instrument construction materials were produced by ion sources. Bombardment of a sample surface with a primary ion beam followed by mass spectrometry of the emitted secondary ions constitutes secondary ion mass spectrometry (SIMS).